首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
REACTIVE ION ETCHING APPARATUS.
摘要
申请公布号
EP0140975(A4)
申请公布日期
1988.01.07
申请号
EP19840901223
申请日期
1984.03.19
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
TOMITA, KAZUYUKI;TANNO, MASUO;YAMADA, YUICHIRO
分类号
H01J37/32;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01J37/32
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Redox catalyst for the initiation of emulsion polymerization
Adhering an ink jet recording head using photopolymerisable adhesive
Method and means for determination of rheumatoid factors
Power inverting apparatus
Combination of a cartridge adaptor and a cartridge to be accommodated in the adaptor
Electrophotographic photosensitive member, and electrophotographic apparatus and apparatus unit having the electrophotographic photosensitive member
Interruption circuit for use with a central processing unit
CIRCUIT AND METHOD FOR LOCATING DATA SECTORS IN EMBEDDED SERVO HARD DISC DRIVES
High oleic polyol esters, compositions and lubricants functional fluids and greases containing the same
POLYOLEFIN RESIN COMPOSITION
Styrene-isoprene-styrene block copolymer composition for low viscosity low application temperature hot melt adhesives
POLYVINYL BUTYRAL TACKIFIER FOR VINYL CHLORIDE POLYMER COMPOSITIONS
Polymerization apparatus and a method for producing polymer using the same
Suspension concentrate compositions of arylpyrrole insecticidal and acaricidal agents
IGNITION RESISTANT CARBONATE POLYMER BLENDS
Polyvinyl chloride based resin composition
PROCESS FOR MARKING OF DEFECTIVE SPOTS IN HOT WORKPIECES TO BE TESTED
THICK AlZnMgCu ALLOY PRODUCTS HAVING IMPROVED PROPERTIES
DOUBLE OBTURATOR VALVE
MAGNETIC SEPARATION METHOD FOR IRON CARBIDE
