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发明名称
METAL ION SOURCE
摘要
申请公布号
JPS632228(A)
申请公布日期
1988.01.07
申请号
JP19860146337
申请日期
1986.06.23
申请人
ANELVA CORP
发明人
NADAGUCHI AKIRA;KATO TAKAO;HIRATA KAZUO
分类号
H01J27/26;H01J37/08
主分类号
H01J27/26
代理机构
代理人
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地址
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