| 摘要 |
PURPOSE:To describe onto a plurality of photosensitive substrates efficiently, to enable loading and unloading easily and to enable transfer to the next process smoothly, by performing the pattern description while employing a roll substrate cassette containing a description roll substrate wound into a roll film, thereby eliminating the necessity of prealignment for every description. CONSTITUTION:An unexposed description roll substrate 11 formed into a roll film is stored in a roll substrate cassette 12, then said roll substrate cassette 12 is mounted on a unidimensionally movable stage 13. Simultaneously with the motion of said stage 13, the description roll substrate 11 is raster scanned by means of a light spot so as to describe a pattern. When one frame pattern is described, one frame of the description roll substrate 11 is taken up by means of a take-up means 31. Since the prealignment work is required only one time for a single roll substrate cassete 12, the description can be performed quite efficiently. |
