METHOD OF INSPECTING LARGE SCALE CELL,申请号JP19860144578-传众专利搜索

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发明名称	METHOD OF INSPECTING LARGE SCALE CELL
摘要
申请公布号	JPS631047(A)	申请公布日期	1988.01.06
申请号	JP19860144578	申请日期	1986.06.19
申请人	FUJITSU LTD	发明人	SATO SHINJI
分类号	H01L21/66;G01R31/28;G11C29/00;G11C29/56;H01L21/82;H01L21/822;H01L27/04;H01L27/118	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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