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发明名称
VERFAHREN ZUR FESTSTELLUNG DER KONTAKTIERQUALITAET AN HALBLEITERBAUELEMENTEN
摘要
申请公布号
DD253117(A1)
申请公布日期
1988.01.06
申请号
DD19860294779
申请日期
1986.09.29
申请人
VEB MIKROELEKTRONIK "ANNA SEGHERS" NEUHAUS,DD
发明人
LINDNER,ROBERT,DD;BRANDT,LOTHAR,DD;BOEHM-BEYER,MONIKA,DD;WEIGELT,HEIDRUN,DD
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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