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发明名称
APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPS631027(A)
申请公布日期
1988.01.06
申请号
JP19860144117
申请日期
1986.06.20
申请人
TOSHIBA CORP
发明人
UEKI YUJIRO
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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