| 摘要 |
PURPOSE:To make a continuous operation possible while supplying a large electric power and to prevent the electric power from wasting, by insulating a vacuum container from an electric circuit connecting first and second discharging electrodes. CONSTITUTION:This plasma treatment apparatus for sheet-like material is fixed and rotated on a rotating shaft 14 penetrating through a vacuum container and both of a drum-shaped first discharging electrode 2 along the outer circumference of which a sheet-like material A is situated and a second discharging electrode 3 facing the first electrode are set in a vacuum container 1. The vacuum container 1 is electrically insulated from an electric circuit 6 connecting both the electrodes 2 and 3 and an insulating material 14e is set on the outer circumference of the rotating shaft 14 of the first discharging electrode 2. |
