| 摘要 |
PURPOSE:To prevent the discharge loss of the melt of a vapor deposition raw material such as Au from a recessed part to be charged with the vapor deposition raw material of an Mo heater boat to be used for vapor deposition of Au and Ag by decreasing the surface roughness of the above-mentioned recessed part. CONSTITUTION:Electrodes 4, 4' are mounted to both ends of the Mo heater boat 1 having the recessed part 2 to be charged with the vapor deposition raw material 3 such as Au or Ag as a vessel for heating and evaporating the Au or Ag, etc. as the vapor deposition material in a vacuum deposition device. The Mo heater boat 1 is energized from the electrodes 4, 4' and the Au and Ag in the recessed part 2 are melted and evaporated by the resistance heat thereof, by which the vapor thereof is deposited on the objective substrate. The surface roughness of the recessed part of the Mo heater boat 1 is adjusted to <1.0mum height, by which the rise of the molten Au and Ag in the foam state in the recessed part 2 by the capillarity and the spilling thereof from the heater boat as a loss are prevented. |
