| 摘要 |
PURPOSE:To form thermally decomposed isotropic carbon having no columnar cross-sectional structure and low BAF on a base material with satisfactory adhesion by feeding a gas contg. a halogen substituted aromatic compound to the surface of the base material heated to a specified temp. under reduced pressure to thermally decompose the compound. CONSTITUTION:A gas contg. a halogen substituted aromatic compound such as C6H5Cl and/or a halogenated chain hydrocarbon producing a halogen substituted aromatic compound in a nonoxidizing atmosphere at >=500 deg.C, e.g., 1,1,1-trichloroethane is fed to the surface of a base material of artificial graphite or the like heated to >=1,400 deg.C under reduced pressure to thermally decompose the compound. The preferred reduced pressure is <=about 100Torr and the preferred heating temp. is 1,500+ or -100 deg.C. Thus, thermally decomposed isotropic carbon having no columnar cross-sectional structure and <=5 BAF which shows anisotropy ratio is formed on the base material with satisfactory adhesion without causing interlaminar stripping or breaking. |
