| 摘要 |
<p>A pressure transducer has a stress isolator layer (18) which permits the sensor (25) to be non-resiliently mounted (hard mounted) to a mounting surface (26) that in turn is subjected to strain. The strain of the mounting surface (26) tends to induce undesired stress in the sensing diaphragm (25) and the present stress isolator layer (18) minimizes the amount of stress that is transferred to the sensing diaphragm (25) to thereby reduce error. The spring (17) preferably comprises a silicon leaf-type spring (17) with or without isolating slots and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gauge resistors (32) or through capacitive sensing.</p> |
