| 发明名称 |
Gate valve for wafer processing system |
| 摘要 |
A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.
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| 申请公布号 |
US4715764(A) |
申请公布日期 |
1987.12.29 |
| 申请号 |
US19860856876 |
申请日期 |
1986.04.28 |
| 申请人 |
VARIAN ASSOCIATES, INC. |
发明人 |
HUTCHINSON, MARTIN A. |
| 分类号 |
H01L21/00;H01L21/677;(IPC1-7):B65G51/02 |
主分类号 |
H01L21/00 |
| 代理机构 |
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