CONTROLLING SYSTEM FOR WAFER PROCESSING DEVICE

摘要

PURPOSE:To enable operational tests to be performed in the vicinity of a tested object, by making an operator panel for giving operational directions to desired processing structures become connectable with a master controller or the respective machine controllers. CONSTITUTION:When an actuator trouble or the like occurs in an actuator 124 of a washing unit 14a, a new actuator 124 is connected with a driver interface 120 of a washing unit controller 16a. An operator panel 27 is then connected with a connection terminal 25a of the washing unit controller 16a through a communication cable 29. In this case, the connection terminal 25a connects the operator panel 27 with the interface 104 of the washing unit controller 16a. Operational tests of the actuator 124 are performed by using this operator panel 27. Because the operator panel 27 is this connected with the washing unit controller 16a through the flexible communication cable 29, the operator can operate the panel 27 while observing the prescribed actuator 124.