| 摘要 |
PURPOSE:To uniform the sectional shapes of corner parts and to obtain corner shapes which are cut along a pattern shape by equalizing the gap between a dummy pellet part provided in a cut part partitioning pellet parts and an adjacent pellet part to the gap between pellet parts. CONSTITUTION:An exposure mask consists of plural pellet parts 1 which are square and rounded at four corners and cut off light, the transparent cut part 2 which partitions the pellet parts 1 in a checkerboard shape, and dummy pellet parts 3 which are homogeneous with the pellet parts 1 and cut off light. The gaps t2 between the dummy pellet parts 3 and the corner parts of adjacent pellets 1 are equal to the gaps between pellet parts 1 and 1, i.e. the width t1 of the cut parts 2 at straight parts. Then, no resist is formed at the parts in the cut parts 2 opposite the dummy pellet parts 3, the line width of this resist is all equal to t1 and t2, and the width of etching by chemical cutting is uniformed. |
