| 摘要 |
PURPOSE:To easily distinguish whether a defect is caused by excess or lacking exposure or contrast defect due to defocusing or uncomplete contact by forming a check pattern as a trapezoidal shape and arranging respective check patterns adjacently. CONSTITUTION:Plural selectively formed trapezoidal patterns are adjacently arranged on an area other than a part where patterns forming prescribed circuit function elements on a photomask. In case of excess or lacking exposure, the line width of the patterns is contracted or expanded as a whole, and in case of defective contrast, a part near the upper side of the trapezoidal pattern 2 is more contracted as compared to a part near the bottom of the pattern 2, both the defective cases can be easily distinguished. |
