| 摘要 |
PURPOSE:To remarkably improve adhesiveness and to improve the running durability of a magnetic recording medium under high temp. by forming a carbonaceous protective film while impressing -10V--100V bias voltage. CONSTITUTION:The carbonaceous protective film is formed by sputtering while -10V--100V bias voltage is impressed. For example, a target 12 for a perpendicularly magnetized film consisting of Co80-Cr20 or the like and a target 13 consisting of carbon for a surface protective film are installed in a sputtering chamber 2 so as to face a cylindrical can 3, and a Co-Cr target 14 for the perpendicularly magnetized film and a carbon target 15 for the protective layer are installed to face a cylindrical can 4. After the sputtering chamber is evacuated to <=1X10<-6>Torr pressure, gaseous Ar is introduced from a gas introducing system 16 into said chamber and is maintained under about 3X10<-3>Torr and -50V bias voltage is impressed to bias rings 17, 18.
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