| 摘要 |
PURPOSE:To improve the supply of supplementary processing liquid and to perform processing of high quality by connecting one end of a supplementary processing liquid supply path member which couples a supplementary processing liquid storage part with a processing liquid storage part to the inside of the supplementary processing liquid storage part airtightly. CONSTITUTION:Supply means 81-83 for supplementary processing liquid consist of supply pipes 81A-83A as supplementary processing liquid supply path members and suction pumps 81B-83B respectively. Entrance-side coupling parts 81C-83C at one-terminal sides of the supply pipes 81A-83A are positioned while exposed in an arrangement chamber 70 and exit parts 81D-83D on the other-terminal sides of the supply pipes 81A-83A are fixed on processing tanks 61-63. The entrance-side coupling parts 81C-83C of the supply pipes 81A-83A are provided with clamping members equipped with, for example, nuts, packings for airtight connection, etc., and the supply pipes are connected airtightly to the supply ports of the supply containers 71-73 by those clamping members to connect the insides of the supply pipes 81A-83A to the insides of the supply containers 71-73 airtightly.
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