| 摘要 |
PURPOSE:To surely remove microprojections existing on the surface of a nonmagnetic substrate by forming an underlying film to the substrate, then bringing cleaning tapes into press contact with the film surfaces thereof and relatively moving the film surface and the cleaning tape. CONSTITUTION:The substrate 1 of which the surface is subjected to a underlaying treatment is mounted on a substrate driving shaft 8 and the substrate 1 is rotationally driven around the shaft. Respective blocks are moved in a direction (b) and the cleaning tapes 2 of the respective blocks are brought into press contact with both faces of the substrate 1 by contact rubber rollers 3 and while the tapes 2 are taken up and moved, the surfaces are simultaneously polished. The fresh tapes 2 are delivered from supply reels 4 and are used for polishing during the polishing and the tapes 2 having the stained surfaces are taken up on take-up reels 5. Since always the clean tapes 2 exist on the surfaces under the polishing according to the above-mentioned constitution, the damage of the substrate surface by the microprojections removed from the substrate surfaces is obviated. |
