| 摘要 |
PURPOSE:To obtain stable discharge, by cooling the tube wall itself of a laser tube with liquid, utilizing the laser itself as an effective heat exchanger, and suppressing the increase in temperature of laser gas. CONSTITUTION:A high speed gas circulator 2, which makes it possible to perform highly repetitive operations of a laser, and a discharge electrode pair 3 are provided in a laser tube 1. Water-cooling pipe 5 is wound around the laser tube 1 in a coil shape, and the wall of the laser tube is cooled. In this structure, the tube wall itself of the laser tube 1 becomes a heat exchanger. The increase in temperature of laser gas due to discharge can be suppressed. Thus stable discharge is obtained. Since the wall of the laser tube 1 is directly cooled by the water-cooling pipe 5, yield of impurities from the wall of the laser tube is less. Therefore deterioration of the laser gas is less. Since a heat exchanger, which is an obstacle for gas streams 4, is not required in the gas flow path in the laser tube 1, the high speed gas streams 4 can be formed in the gap of the discharge electrode pair 3. Thus the repeating frequency of the laser can be increased. |
