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发明名称
BILATERAL EXPANSION CONVEYOR
摘要
申请公布号
JPS62297085(A)
申请公布日期
1987.12.24
申请号
JP19860141022
申请日期
1986.06.17
申请人
FUJI ELECTRIC CO LTD
发明人
YOSHIDA MAKOTO
分类号
H01L21/677;B25J18/02;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
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