摘要 |
PURPOSE:To obtain the lapping agent which possesses the superior dispersion stability and is easily washed and removed by water, by dispersing the polishing particles into the basic agent consisting of the mixture of specific glycols, organic bentonite, and water, as main agent. CONSTITUTION:The organic bentonite is prepared by using aliphatic tertiary amine and replacing basic group with bentonite, and the content in the lapping agent is 0.2-20wt% for 100wt% of glycols. As the glycols, used is the compound represented by the formula, e.g., carbinol, ethylene glycol, etc. which is hardly evaporated and ignited, and the dispersion stability is improved by using the glycols easily dissolized into water. As the polishing particles, used are diamond, boron nitride, etc., and the content in the lapping agent is 0.1-5wt% for 100wt% of glycols. Then, water is compounded for adjusting viscosity and improving the cleaning performance. |