| 摘要 |
PURPOSE:To obtain a colored image without substantial reduction in the pitch of picture element arrangement in lateral direction by a method wherein a plurality of columns of photoelectric conversion elements are arranged, and a colored filter is provided on the elements. CONSTITUTION:A diode lower electrode 6 consisting of Cr film, an electrode lead and the like are provided on a glass plate, amorphous silicon hydride Si is superposed in the order of n, i, and p, a plasma etching is performed, and a pattern 5 of photodiode and isolation diode is formed. An SiO2 film is superposed, a connection window 4 is provided on each elment and a double-layer wiring part, and a transparent electrode 7 and the upper electrode 3 of Cr-Al double film to be used for the isolation diode are superposed. Then, a gelatin pattern is provided on the specific acryl resin, and after a dyeing work has been performed, unnecessary resin is removed, and three-color filters are selectively laminated. Through these procedures, the photodiodes (6-5-4) are formed in two adjoining columns, the upper electrode 3 is formed common and the isolation diode (3-5- 4) corresponding to the photodiode is placed outside the photodiode. In this sensor, as the signals in three primary-colors are picked out in a set of two picture-elements in the main scanning direction (vertical), the colored image having higher degree of resolution than one column arrangement can be obtained. |
