| 摘要 |
PURPOSE:To obtain a sensor which accurately detects a pressure distribution and has superior reliability and stability by arraying plural high-rigidity piezoelectric elements between an unknown body and a contacting part and pressing the elements against the unknown body. CONSTITUTION:The plural piezoelectric elements 2 are fixed on a support member 1 made of a conductive material. The respective elements 2 are provided with electrodes 3 on the opposite surfaces from surfaces which contact the member 1 and lead-out electrodes 4 connecting with the electrodes 3 are formed on flanks. The other electrode of each element 2 is so formed as to abut on the member 1 and this element is composed of a piezoelectric element with high rigidity such as piezoelectric ceramics. The unknown body is brought into contact with the element 2 from the side of the electrode 3 and the element 2 in contact has piezoelectric effect. For the purpose, a switch 7 is switched successively to detect pressure on each element 2 in order, thereby obtaining the pressure distribution. Further, the piezoelectric element is made of a rigid body, so elastic contact logic is applied to accurately estimate the material and curvature of the unknown body.
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