| 摘要 |
PURPOSE:To maintain an atmosphere in a reaction chamber constant by detecting the removal of a contaminant in the chamber which forms the components of a dissociation reaction product by the attenuation of an emission spectrum of specific dissociation reaction product in a plasma generated in the chamber. CONSTITUTION:Oxygen gas is introduced from an oxygen gas inlet 2 into a reaction chamber 1 held in high vacuum state, one 4 of a pair of opposed electrodes 3, 4 is grounded to use the grounded chamber 1 as an anode. A high frequency power is applied to the other electrode 3 to activate oxygen gas by a glow discharge to generate a plasma, and reactive product adhered to the inner wall of the chamber is reacted with the oxygen to be dissociated. The emission spectrum of the generated gas in the chamber 1 is detected by a carbon monoxide interference filter 5, the detected spectrum is converted by a photodiode 6 to an electric signal, the signal is further amplified by an amplifier 7, and recorded by a recorder 8. Thus, the atmosphere in the chamber can be maintained constant.
|
