| 摘要 |
PURPOSE:To obtain a sufficient transfer efficiency even with the titled device of small size and high density by constituting a charge transfer channel part by the repetition of unit patterns whose width is spread slowly and narrowered rapidly in a direction of charge transfer. CONSTITUTION:The charge transfer channel part 1, separated by a separation spread region 2, consists of the repetition of unit patterns whose width is spread slowly and narrowered rapidly in a direction of the charge transfer. Gate electrodes 3, 4, 5, 6 form a transfer potential for transfer to the channel part 1 and the electrodes 4, 6 constitute the 1st layer gate electrode. Even with the device formed in small size and high density, no complicated manufacture process is required and a sufficient transfer efficiency is obtained. |
