发明名称 VERTICAL MOSFET
摘要 PURPOSE:To expand a safe operation region of an element by making a groove extending through a source region and a channel region to a semiconductor base to be a drain region, and by providing in this groove a source electrode which forms a Schottky junction with the semiconductor base. CONSTITUTION:A groove extending to an n-type base layer 3 through an n<+> source region 6 and a P<+> base layer 5 is made in the almost central portion of the P<+> base layer 5, and a source electrode 11 reaches the inside of this groove. The central portion of the P<+> base layer 5 is removed, and in place of it, the metal source electrode 11 extends to the n-type base layer 3 so that it forms a Schottky junction 13. By this structure, the base resistance Rs of a parasitic transistor Q2 is reduced, while the Schottky junction 13 is equivalent to a new addition of a collector C2 in relation to the other parasitic transistor Q1.
申请公布号 JPS62296474(A) 申请公布日期 1987.12.23
申请号 JP19860139122 申请日期 1986.06.17
申请人 NISSAN MOTOR CO LTD 发明人 MIHARA TERUYOSHI
分类号 H01L29/872;H01L29/417;H01L29/47;H01L29/68;H01L29/739;H01L29/78 主分类号 H01L29/872
代理机构 代理人
主权项
地址