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发明名称
PROBING SYSTEM
摘要
申请公布号
JPS62296187(A)
申请公布日期
1987.12.23
申请号
JP19860140613
申请日期
1986.06.17
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
TAKAHASHI MASUO;SAKAMOTO TOSHINORI
分类号
G01R1/06;G01R31/28;G02F1/133;G02F1/1345;G09F9/00;H01L21/66
主分类号
G01R1/06
代理机构
代理人
主权项
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