| 摘要 |
PURPOSE:To easily position a sample by scarcely being influenced by a gravity thereto by providing a sample holder for detachably holding the sample attached to a moving table, and rotatably supporting means for rotatably supporting the holder on the table. CONSTITUTION:A Z table 6 movable in a vertical plane for placing a sample 12 and a driving mechanism for moving the table 6 to a predetermined position are provided. A sample holder 8 which can detach the sample 12 is rotatably provided on the table 6 movable in the vertical plane, and the sample 12 is detached or attached in substantially horizontal plane. Thus, at the time of attaching the wafer to the table, it is not necessary to position in a gravity direction to simply the attaching operation and to prevent the wafer from dropping from the table. |
