PRODUCTION OF PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To remarkably improve the evaporation condition of Cr and to provide the excellent uniformity of a film compsn. to the resultant Co-Cr alloy film by using a Cr evaporating source as a platy evaporating source at the time of forming the Co-Cr alloy film by two-sources vapor deposition. CONSTITUTION:The Cr evaporating source is constituted as the platy evaporating source at the time of forming the magnetic Co-Cr film by a two-sources vapor deposition method on a nonmagnetic substrate. The platy evaporating source refers to evaporating sources each of which has the area of >=1/10 the total area of the evaporating source. The variance of the film compsn. with respect to an evaporation rate ratio is thus remarkably improved by using the platy Cr evaporating source as the evaporating source, by which the perpendicular magnetic recording medium having the excellent uniformity of the magnetic characteristics is manufactured.