| 摘要 |
PURPOSE:To obtain the device which is made small, light, highly speedy and high accurate by using a servo motor as a driving system in an inner cylinder case, linking directly this and a driving shaft and engaging a valve. CONSTITUTION:A gas governor device is composed of an outer cylinder case 1 and an inner cylinder case 2, and the said inner cylinder case 2 is fixed to the outer case 1 with a rib 3. A servo motor 4 for driving is stored into the said inner case 2 and directly linked through a coupling 6 with a driving shaft 5. To the counter driving side of the shaft 5, a valve 8 is fitted, a guide shaft 9 is fitted at the said valve 8 and held at a guide bearing 11. The inner cylinder case 2 and the valve 8 are hermetically sealed by bellows 12, and at the part contacted with the outer cylinder case 1, a valve seat is provided. Thus, a gas flow path 14 is provided between both cases and between the outer cylinder case 1 and the valve 8, a gas secondary pressure is controlled at a high speed and with a good accuracy and simultaneously, the operating pressure is constantly kept.
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