| 摘要 |
PURPOSE:To improve the aligning precision by providing an aligning pin, a pressing member, and a work releasing pin in a developing machine where a work or the like is carried to an upper face exposure device and a lower face exposure device and is exposed. CONSTITUTION:A work and/or a mask is carried to the lower face exposure device and the upper face exposure device by a carrying device and is exposed. For example, the work or the mask is placed on the exposure base 3a of the lower face exposure device and is radiated with light from below to expose the lower face. Three aligning pins 3d are provided on the exposure table 3a and are simultaneously inserted to the aligning holes of the work or the mask to align the work or the mask. The work or the mask is pressed to the exposure table 3a from above by the pressing member. After exposure, the work or the mask is pushed up and is released from the exposure table 3a by work releasing pins 3e or mask releasing pins 3f provided in the vicinity of positioning pins 3d. The work or the mask is exposed similarly in the upper face exposure device. Thus, the positional precision of the work and the mask is improved, and they are easily released after exposure and are smoothly carried. |
