| 摘要 |
PURPOSE:To improve positioning of works by providing a pallet, on which works are piled up, with positioning pins for works or a carrying-in device in a developing machine where works or the like are carried to a lower face exposure device and an upper face exposure device and are exposed. CONSTITUTION:Works and/or masks are piled up on a pallet 10 and are carried to the carrying-in device, the lower face exposure device, and the upper face exposure device by a carrying device and are exposed. The pallet 10 is provided with positioning pins 11, and the pin 11 on one face and that on the other face are joined as a work/mask positioning part 11a and a pallet positioning part 11b respectively. The work/mask positioning part 11a is inserted to the positioning hole 13a of a work and a positioning hole 14b of a mask 14 to position the work 13 and the mask 14. The pallet positioning part 11b is engaged with the notched part of a positioning guide of the upper plate of the carrying-in device to position the pallet 10 to the carrying-in device. Since the work/mask positioning part 11a and the pallet positioning part 11b are joined integrally the work and the mask are positioned with the high precision. |
