| 摘要 |
PURPOSE:To manufacture a thin film magnetic head with high accuracy and low cost by providing a slot for confirming depth of gap on a base, packing a ceramic material such as SiO2 or Al2O3 into the slot so as to attain the end of grinding. CONSTITUTION:A slot 2 with less accumulated pitch is processed on the surface of the base 1 at a prescribed feeding pitch by an accurate dicing M/C. In packing the ceramic material such as SiO2 or Al2O3 into the slot 2, the face is ground accurately, mask alignment is applied based on the end face of the slot 2 and various thin films are formed by laminating the films for a lower magnetic pole 4, a gap, an insulation layer 6 and an upper magnetic pole 8. The grinding and polishing processing is applied accurately to the depth 10 of gap while using the slot 2 as a gist. That is, when the ceramic material such as SiO2 or Al2O3 packed in the slot 2 by the final grinding processing is lost, a prescribed gap depth 10 is obtained. |
