| 摘要 |
PURPOSE:To improve the aligning precision and to prevent the floating of a work by providing an exposure device with aligning pins and a pressing member in a developing machine where he work or the like is carried to a lower face exposure device and an upper face exposure device and is exposed. CONSTITUTION:The work and/or a mask is carried to the lower face exposure device and the upper face exposure device by a carrying device and is exposed. For example, the work or the mask is placed on the exposure base 3a of the lower face exposure device and is radiated by light from below to expose the lower face. Aligning pins 3d are provided on the exposure base 3a and are inserted to position the holes of the work or the mask to position the work or the mask. The work or the mask is pressed to the exposure base 3a from above by the pressing member. The upper face of the work or the mask is exposed by the upper face exposure device similarly. Thus, the floating and the inclination of the work or the mask are prevented to accurately align the work or the mask at the time of aligning the work or the mask. |
