| 摘要 |
PURPOSE:To form a glass film with uniform composition and thickness by fixing the temperature of a substrate in respective places, and while repeatedly switching the leading-in direction of material gas, stacking the glass on the substrate. CONSTITUTION:Heating means 24, 25 for the oxidation of glass material gas 22 and a heating means 26 for heating a substrate are independently set up so that the heating means 24, 25 are arranged on both the sides of the heating means 26 and the temperature of the substrate 21 is fixed in respective positions, and while repeatedly switching the leading-in direction of the gas 22. Since the temperature of the substrate 21 is fixed in respective positions, the composition and density of an oxide stacked on the substrate 21 is almost fixed in respective positions, and since the original gas 22 is led in alternately from both the ends of a reaction pipe, the oxide is uniformly stacked in respective positions. |
