| 摘要 |
PURPOSE:To highly accurately match wired pattern projection images formed on the both-face of a flexible substrate by carrying the substrate in the vertical direction and projecting light beams to reticles forming wired patterns from both the sides by projection optical systems having telecentric images sides. CONSTITUTION:The flexible substrate 3 obtained by forming conductive layers and photosenstive resist layers covering the conductive layers on the both-face of an insulating band-like substrate is laid between a feeding shaft 4 and a winding shaft 5, carried in the vertical direction by rollers 4a, 5a and led into the image formation side of the projection optical systems 1a, 1b arranged on symmetrical positions about a vertical line and having telecentric image sides. The reticles 2a, 2b forming wiring patterns are arranged on the opposite sides of respective projection optical systems 1a, 1b to the substrate 3. The reticles 2a, 2b are projected by uniform light radiated from light sources 6a, 6b consisting of a pair of mercury lamps arranged vertically and upward, converted their direction into the horizontal direction by reflectors 7a, 7b and made incident in parallel with an optical axis C by condenser lenses 9a, 9b through integrators 8a, 8b. |
