| 摘要 |
PURPOSE:To rapidly remove an impurity mixed in pure water in a tank and unnecessary grown film molecules by providing a first water tank having a water supply port under water level for developing film forming molecules and a second water tank which surrounds the first tank. CONSTITUTION:A monomolecule film accumulator has an outer tank 6 outside a water tank 1, and avoids the contact with the water level by a barrier 3 at the time of cleaning to move upward. Pure water is supplied from the port 9 in the bottom of the tank 1. In this case, water is steadily supplied to prevent the pure water in the tank 1 from convecting. The pure water 11 is steadily overflowed from the tank 1, and water level, mixed impurity 7, film forming molecules 5, 6 which become unnecessary are simultaneously overflowed to clean the tank. An exhaust port 12 is formed at the bottom of an outer tank 8 to exhaust pure water which contains contaminants. According to this structure, molecular orientation is high to uniformly form a monomolecule accumulation film in high efficiency.
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