| 摘要 |
PURPOSE:To prevent the surface of a semiconductor from being contaminated by providing an air stream contact preventing hood between a stationary gas and the semiconductor to prevent a static electricity from being generated on the semiconductor. CONSTITUTION:A semiconductor substrate 2 and a carrier 4 are rotated at a high speed at a rotational shaft 1 as a center. At this time, the air in a drying tank 6 is stopped. A hood 3 is provided outside the substrate 2 and the carrier 4 to prevent the high speed air stream from contacting the surface of the substrate. Thus, it can prevent a static electricity from being generated on the substrate to prevent the substrate from being contaminated due to the adherence of contaminant by means of static electricity.
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