| 摘要 |
PURPOSE:To stabilize the boundary of deposited films and the physical properties of the vicinity of the boundary by heating a preform generating tube for generating a preform and an active seed generating tube for generating an active seed. CONSTITUTION:A material gas A introduced from an input tube 101 to a preform generating tube 114 and a material gas B introduced from an input tube 102 to an active seed generating tube 113 are activated by a microwave in preform generating space 104a and an active seed generating space 104b to generate the preform and the active seed. The gas A including the preform and the gas B including the seed are introduced to a vacuum chamber 103. The preform and the seed are combined in a combining space 107 to form a deposited film on a substrate 109. Sheet heaters 106 are wound in the vicinity of a junction of the periphery of the tube 113 and the generating tube of a waveguide 112 to heat the gas B and the gas A before generating the seed and the preform. Thus, the seed and the preform are stably generated in the generating reactions. |
