| 摘要 |
PURPOSE:To facilitate the manufacture while of the title array increasing the yield thereof by a method wherein sensing part is selectively formed on an unisolated specific part of the first electrode layer. CONSTITUTION:The first electrode layer 12 is unisolatedly formed on the specified part of transparent insulating substrate 11. A sensing part 13 is selectively formed into unisolated shape on the specified part of layer 12 while an insulating layer 14 is deposition-formed on the overall surface of substrate 11. Then the layer 14 is patterned to cover a part of sensing part 13 while pressure-extending toward interconnection part side. Next, when the overall surface of substrate 11 is coated with conductive material for patterning, multiple band type second electrode 15 in contact with the surface of sensing part 13 extending toward the interconnection part side and an auxiliary electrode layer 16 etc. are formed to make photodetector array easily. In such a constitution, the sensing part 13 of this array is unisolated from each other so that the probability of making pinholes in case this array is made may be lessened while increasing the manufacturing yield of photodetector array. |
