| 摘要 |
PURPOSE:To reduce aberration and endure disturbing vibration to improve performance and environmental property, by introducing a sample into an object lens and using a sample chamber jointly with magnetic paths of the lens and disposing a carriage device on the lower magnetic pole of the object lens. CONSTITUTION:A sample 5 is put in a lens gap, and a high-resolution image is obtained by shortening a focal length of the lens. Magnetic paths formed of an object lens magnetic path 2 and a lower magnetic pole 3 is used jointly with a sample chamber to simplify and miniatur ze its structure. Because X and Y carriage boards 6 and 7 are installed to mount the sample 5 on the base of the magnetic pole 3, stability of the sample 5 against electrons 10 is enlarged to largely endure outside vibration. The highresolution image can be obtained by reducing the aberration in this way. This device thus becomes strong against disturbing vibration, resultantly capable of obtaining high performance and environmental property improved.
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