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发明名称
MAKING AMORPHOUS SEMICONDUCTOR ALLOYS USING MICROWAVE ENERGY
摘要
申请公布号
AU568192(B2)
申请公布日期
1987.12.17
申请号
AU19850039614
申请日期
1985.03.07
申请人
ENERGY CONVERSION DEVICES INC.,
发明人
STANFORD R. OVSHINSKY;DAIVD D. ALLRED;LEE WALTER;STEPHEN J. HUDGENS
分类号
C23C16/50;C23C16/511;H01J37/32;H01L21/205;H01L29/161;H01L31/04;H01L31/20;(IPC1-7):H01L21/205;H01L31/18;C23C14/40
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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