发明名称 ELECTRICALLY VARIABLE MEMORY HOLDING FLOATING GATE MEMORY DEVICE
摘要 Disclosed is an electrically alterable, floating gate type, nonvolatile, semiconductor memory device wherein the gate oxide layer (9') in the "injection" area between the silicon (17) (drain region of the device) and the floating gate (19), has an increased thickness in respect of the thickness of the same gate oxide layer (14) over the channel region (15) of the device in order to decrease the parasitic capacitance of the injection area, thus improving the programming threshold voltage characteristics. A method for fabricating the improved memory device is also disclosed.
申请公布号 JPS62291180(A) 申请公布日期 1987.12.17
申请号 JP19870132028 申请日期 1987.05.29
申请人 SGS MICROELETTRONICA SPA 发明人 GABURIERA FUONTANA
分类号 H01L21/8246;H01L21/8247;H01L27/112;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8246
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