| 摘要 |
PURPOSE:To decrease circuit elements for division operation extremely by diving a circuit region into a plurality of circuit blocks and arranging the circuit blocks, mounting electronic switches to each circuit block and respectively fitting window materials, transmission wavelength of which are set, onto separate photodetector. CONSTITUTION:Optical transmission window materials 13(131, 132...), materials and film thickness of which are selected so as to transmit beams having specific wavelengths, are each dispersed and shaped onto an integrated circuit chip 11, and the window materials 13 are formed by optical transmission films, film thickness of which is set so as to transmit only specific wavelength components by utilizing interference on a PSG film coating the integrated circuit chip. Photodetectors are shaped respectively under the window materials 13, and electric switches switching ON-OFF of circuit blocks, employing each photodetector as switching elements are constituted. When the transmission characteristics of the window materials 13 are made to differ little by little at every circuit block and division test operation is conducted, the wavelength of irradiation beams by a irradiator 33 is swept and the circuit blocks are worked selectively in succession, the signals of the states of operation of each circuit block are detected through a channel 35, and the division test of an integrated circuit 22 is performed.
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