发明名称 TRANSISTOR FOR MONITORING DIFFUSING STEP
摘要 PURPOSE:To permit no electric writing by preventing the potential of a gate electrode from rising when exposed to a high electric field by connecting the gate electrode with a reverse conductivity type diffused layer to semiconductor substrate provided outside a diffused region. CONSTITUTION:An aluminum electrode 1 (1)-a contact 6 between aluminum/a diffused layer-a diffused layer 7-a contact 8 between a diffused layer/a poly silicon-polysilicon gate electrode 2 are sequentially connected, and the electrode 2 is connected through the reverse conductivity type diffused layer 7 to a semi conductor substrate. A diode 13 is formed between the diffused layer/the sub strate at a gate electrode 11, and the diode 13 depends on the substrate and the impurity density of the layer 7 with a reverse breakdown strength of approx. 17-25V. Accordingly, a gate voltage below reverse breakdown strength is applied to the electrode 11 to measure characteristics. Thus, even if a strong electric field is applied during diffusing step, the rise of the gate potential is limited by the reverse breakdown strength of the diode 13. Therefore, a writing does not occur.
申请公布号 JPS62291130(A) 申请公布日期 1987.12.17
申请号 JP19860136620 申请日期 1986.06.11
申请人 NEC CORP 发明人 SAITO AKITOSHI
分类号 H01L21/8247;H01L21/66;H01L21/822;H01L27/04;H01L29/78;H01L29/788;H01L29/792 主分类号 H01L21/8247
代理机构 代理人
主权项
地址