| 摘要 |
PURPOSE:To accurately position a mark by providing a pattern of the shape in which a mark part is removed at the center of the mark. CONSTITUTION:A pattern recognition mark 1 is formed in a cross shape as a whole, and a cross-shaped blank 2 is formed therein. The central point 5 of the cross shape of the blank is used as a position detecting point. The mark 1 is formed, for example, by patterning a metal film formed by a thick film method by etching. However, since the point 5 is provided at laterally and vertically symmetrical position, even if it is overetched vertically and laterally similarly even if overetched, the point 5 as a central point is not recognized to be displaced. Thus, even if the overetching occurs in the forming step, the position detecting point can be accurately detected to perform an accurate wire bonding. |
