| 摘要 |
PURPOSE:To obtain a Ti compound coated material having superior wear resistance and film adhesion by forming an inner layer of metallic Ti having a prescribed thickness and an outer layer of a specified Ti compound on the surface of substrate. CONSTITUTION:Ti is evaporated and a metallic Ti layer having >=0.05mum thickness is formed as an inner layer on the surface of a substrate of high-speed steel or the like by a reactive ion plating method utilizing hollow cathode discharge. A coating layer of one or more kinds of Ti compounds selected among TiN, TiC and Ti (C, N) is then formed as an outer layer with gaseous N2, gaseous C2H2 or a gaseous C2H2-N2 mixture as a reactive gas. Thus, the adhesion of the resulting film can be improve without lowering the hardness or deteriorating the wear resistance. The Ti compound coated material is especially suitable for a cutting tool or a metallic mold.
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