| 摘要 |
PURPOSE:To provide excellent dimensional stability of a mask for transferring an X-ray by providing a glassy carbon film. CONSTITUTION:A glassy carbon supporting film 1 is formed, for example, on the top of a stationary ring 3, and an Au pattern 2 of an x-ray absorber is formed on the carbon film. The carbon film is formed by carbonizing thermoset resin in an inert atmosphere or carbonizing resin modified to be thermally cured, such as copolymerization or cocondensation. Thus, since the carbon film is used as an X-ray transmitter, a temperature change is small, and a mask for transferring the X ray with high dimensional stability is obtained. |
