| 摘要 |
PURPOSE:To improve detection accuracy by previously storing the inclination and deflection of a wire or belt with a scale and then correcting the position or distance with the stored value. CONSTITUTION:The wire 1 provided with the magnetic scale is held by a couple of holders 2 and 3 and applied with a specific tensile force by the spring 6 of the holder 2. A detector 19 which moves according to the movement of a table 30 or detector base 26 reads the scale of the wire 1. Then, its read signal is processed as specified to obtain the position signal of the table 30. The deflection of the wire 1 is detected by a detector 19' from the variation of a magnetic field prior to measuring operation and the quantity of the deflection is inputted to a control circuit (not shown in figure) while made to correspond to the position. The control circuit computes and stores the correction value of the scale according to the quantity of the deflection and outputs the position corrected with the correction value at the time of actual measurement.
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