摘要 |
PURPOSE:To improve the reliability of the joint between ceramics and material to be welded and to improve the corrosion resistance of the joint part by using a 4-component brazing filler metal consisting of Ag, Cu, Sn, and Ti. CONSTITUTION:The ceramics and ceramics or the ceramics and metal are joined in an inert atmosphere or reducing atmosphere by using the brazing filler metal consisting of the four components; Ag, Cu, Sn, and Ti. The compsn. ratios of the brazing filler metal by weight are preferably 10-40% Ag, 8-56% Cu, 8-56% Sn, and 5-25% Ti; furthermore, the Cu and Sn are preferably 20-80% Cu and 80-20% Sn. The bonding of non-oxide ceramics such as SiN is made possible by using such brazing filler metal. The joining with the high reliability and corrosion resistance is executed with decreased variance. |