| 摘要 |
PURPOSE:To reduce the temperature dependency of transmission resonance impedance by connecting piezoelectric bimorph elements for driving and piezoelectric bimorph elements for detection with each other at right angles by using a joining member which has a modulus of elastic modulus for bending larger than a specific value. CONSTITUTION:The piezoelectric bimorph elements 2 and 3 for driving and piezoelectric bimorph elements 1a and 1b for detection are joined at right angles by using the joining member 7 which whose elastic modulus for bending is >=14X10<4>kg/cm<2>. The joining member of an angular velocity sensor uses, e.g. barium titanate which has a high elastic modulus for bending and to not varies in elastic modulus for bending in a temperature atmosphere where the angular velocity sensor is normally used. The member which meets this requirements is barium titanate ceramic in a table, but even when a plastic material is used for the joining member, the material having a very large elastic modulus for bending is selected to improve the temperature dependency of transmission resonance impedance. |
